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    • - MOF Membranes & Catalysis
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Lithography

Home/Research/Lithography

E-beam Patterning

2025 Nature Chemical Engineering - Spin-on deposition of amorphous zeolitic imidazolate framework films for lithography applications

 

2025 ChemRvix - Extreme Ultraviolet and Beyond Extreme Ultraviolet Lithography using Amorphous Zeolitic Imidazolate Resists Deposited by Atomic/Molecular Layer Deposition

 

2024 SPIE - Amorphous zinc-imidazolate all-dry resists

 

2022 Nature Communications - Solvent-free bottom-up patterning of zeolitic imidazolate frameworks

 

2021 Chemistry of Materials - Positive and Negative Resist

 

2021 Chemical Communications - e-beam Modification

 

 

2024 International Conference on Extreme Ultraviolet Lithography - All-dry zinc-imidazolate resists for electron beam and EUV lithography

 

2024 Advanced Functional Materials - Zinc‐Imidazolate Films as an All‐Dry Resist Technology

 

2023 Nature Materials - Unit-cell-thick zeolitic imidazolate framework films for membrane application

 

2022 Nature Communications - Bottom-up Patterning

 

2021 American Chemical Society -Two distinct stages of structural modification of ZIF-L MOF under electron-beam irradiation

 

2018 Angew. Chem. Int. Ed - e-beam Patterning

 

Tsapatsis Research Group

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