Research Areas
Zeolites | Metal-Organic Framework (MOF) Membranes | Artificial Metalloenzymes (ArMs) | Lithography
MOFs
Since 2009 we develop MOF membranes, most recently, we reported the first all-vapor phase method for MOF membranes. In 2018, we were first to demonstrate electron beam patterning of MOFs, and in 2022 reported the first e-beam bottom up patterning method. These methods are at the forefront of an emerging research area on patterned MOF films and membranes.
Lithograhy
Beginning in 2018, our group began investigating ZIFs as patternable materials. Since then, we have developed a suite of materials that can be deposited and developed by both liquid and vapor phase methodology, to yield both positive and negative tone photoresists for lithographic applications in the semiconductor industry.